Package substrate and fabricating method thereof
AssigneeAaltoSemi Inc.
InventorsMin-Yao Chen, Andrew C. Chang
Life of this patent
Estimating the term…
Abstract
A package substrate is provided, in which a first circuit structure and a second circuit structure with the same specification are formed on opposite sides of a core board body, respectively, and a wiring structure of another specification is formed on the first circuit structure. In addition, the number of wiring layers of the second circuit structure is greater than the number of wiring layers of the first circuit structure to form an asymmetric package substrate. Therefore, by configuration of the wiring structure, the problem of warpage caused by uneven stress can be prevented from occurring to the package substrate.
Claims3
A package substrate, comprising:
- a core board body having a first side, a second side opposing the first side, a first inner circuit layer and a second inner circuit layer protruding from the first side and the second side respectively, and a plurality of conductive vias electrically connecting the first inner circuit layer and the second inner circuit layer;
- a first circuit structure disposed on the first side of the core board body and electrically connected to the first inner circuit layer;
- wherein the first circuit structure comprises a first insulating layer and a first circuit layer embedded in the first insulating layer, and a surface of the first circuit layer is flush with a surface of the first insulating layer;
- a second circuit structure disposed on the second side of the core board body and electrically connected to the second inner circuit layer, wherein the second circuit structure comprises a plurality of second insulating layers and a plurality of second circuit layers bonded to the second insulating layers, the plurality of second circuit layers protrudes from the plurality of second insulating layers;
- a number of wiring layers of the second circuit structure is greater than a number of wiring layers of the first circuit structure, and a line width and a line pitch of the first circuit structure are the same as a line width and a line pitch of the second circuit structure;
- and
- a wiring structure disposed on the first circuit structure, wherein the wiring structure comprises at least one dielectric layer, a redistribution layer bonded with the dielectric layer, and a plurality of blind-via conductors disposed in the dielectric layer and electrically connecting the redistribution layer and the first circuit layer;
- a line width and a line pitch of the wiring structure are different from the line width and the line pitch of the first circuit structure;
- wherein
- a coefficient of thermal expansion of the second circuit structure is equal to a coefficient of thermal expansion of the first circuit structure with the wiring structure as a whole.
A method of fabricating a package substrate, the method comprising:
- forming a first circuit layer on a carrier;
- forming a first insulating layer and a core board body sequentially on the carrier, wherein the first insulating layer is bonded with the carrier to cover the first circuit layer, and the first circuit layer is embedded in the first insulating layer, wherein the core board body has a first side and a second side opposing the first side, the first side of the core board body is bonded with the first insulating layer, and the core board body has a first inner circuit layer and a second inner circuit layer protruding from the first side and the second side respectively, and a plurality of conductive vias electrically connecting the first inner circuit layer and the second inner circuit layer;
- wherein a surface of the first insulating layer is flush with a surface of the first circuit layer;
- forming a second circuit structure on the second side of the core board body, wherein the second circuit structure has a plurality of second insulating layers and a plurality of second circuit layers bonded with the second insulating layer, and the second circuit layer is electrically connected to the second inner circuit layer;
- wherein the plurality of second circuit layers protrudes from the plurality of second insulating layers;
- the core board body, the first insulating layer and the second insulating layer are formed on the carrier in a press-fit manner;
- removing the carrier to expose the first circuit layer and the first insulating layer;
- forming a first circuit structure electrically connected to the first inner circuit layer by the first insulating layer and the first circuit layer, wherein a line width and a line pitch of the first circuit layer is the same as a line width and a line pitch of the second circuit layer, and a number of wiring layers of the first circuit layer is less than a number of wiring layers of the second circuit layer;
- and
- forming a wiring structure on the first circuit structure, wherein the wiring structure has at least one dielectric layer, a redistribution layer bonded with the dielectric layer and a plurality of blind-via conductors disposed in the dielectric layer and electrically connecting the redistribution layer and the first circuit layer, and a line width and a line pitch of the redistribution layer is different from the line width and the line pitch of the first circuit layer;
- wherein
- a coefficient of thermal expansion of the second circuit structure is equal to a coefficient of thermal expansion of the first circuit structure with the wiring structure as a whole.
Dependencies are inferred from the claim text.