Piezoelectric MEMS-based active cooling for heat dissipation in compute devices

An active cooling system comprising:

• a plurality of cooling cells, each of the plurality of cooling cells including a cooling element having a first side and a second side opposite to the first side, the first side being distal to a heat-generating structure and in communication with a fluid, the second side being proximal to the heat-generating structure and in communication with the fluid;
• and
• an orifice plate disposed between the cooling element and the heat-generating structure, a portion of a chamber including the orifice plate and the cooling element, the portion of the chamber having at least one orifice therein, the cooling element being configured to undergo vibrational motion to direct the fluid, which enters the chamber through an aperture distal from the orifice plate, from the first side to the second side and through the at least one orifice such that the fluid has a speed of at least thirty meters per second after exiting the at least one orifice.

A method of cooling a heat-generating structure, comprising:

• driving a cooling element to induce a vibrational motion of the cooling element at a frequency, the cooling element having a first side and a second side opposite to the first side, the first side being distal to the heat-generating structure and in communication with a fluid, the second side being proximal to the heat-generating structure and in communication with the fluid, an orifice plate disposed between the cooling element and the heat-generating structure, a portion of a chamber including the orifice plate and the cooling element, the portion of the chamber having at least one orifice therein, the cooling element being configured to be actuated to direct, via the vibrational motion of the cooling element, the fluid, which enters the chamber through an aperture distal from the orifice plate, from the first side of the cooling element to the second side and through the at least one orifice such that the fluid has a speed of at least thirty meters per second after exiting the at least one orifice.