Embedding a metal-insulator-metal capacitor in a passivation layer
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYing-Ju Wu, Tzu-Ting Liu, Hsiang-Ku Shen, Chen-Chiu Huang, Dian-Hau Chen
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsYing-Ju Wu, Tzu-Ting Liu, Hsiang-Ku Shen, Chen-Chiu Huang, Dian-Hau Chen
Estimating the term…
A passivation layer is formed over an interconnect structure. An opening is etched at least partially through the passivation layer. A first conductive layer is deposited over the passivation layer. The first conductive layer partially fills the opening. An insulator layer is deposited over the first conductive layer. The insulator layer partially fills the opening. A second conductive layer is deposited over the insulator layer. The second conductive layer completely fills the opening. A first conductive structure is formed that is electrically coupled to the first conductive layer. A second conductive structure is formed that is electrically coupled to the second conductive layer.
A device, comprising:
A device, comprising:
A method, comprising:
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