Piezoelectric element and manufacturing method for piezoelectric element

Abstract

The piezoelectric element is a piezoelectric element including, on a substrate in the following order, a lower electrode layer, a piezoelectric film containing a perovskite-type oxide as a main component, and an upper electrode layer, in which at least a region of the upper electrode layer closest to a side of the piezoelectric film is composed of an oxide conductive layer containing In, and regarding an interface region between the piezoelectric film and the oxide conductive layer of the upper electrode layer, in an intensity profile of binding energy, which is acquired by an X-ray photoelectron spectroscopy measurement, a peak intensity ratio γ/α satisfies γ/α≤0.25, wherein α is a peak intensity of binding energy derived from a 3d5/2 orbital of In bonded to oxygen, and γ is a peak intensity of binding energy derived from a 3d5/2 orbital of In bonded to an OH group.

Dependencies are inferred from the claim text.