Organic vapor jet printing system

An apparatus comprising:

• an organic vapor jet print die including a linear array of depositors, with each of the depositors having a cluster of apertures, the organic vapor jet print die comprising:
• at least one first aperture in each cluster of apertures is a delivery aperture that is in fluid communication with a carrier gas source and an evaporation oven;
• and
• at least one second aperture in each cluster of apertures is an exhaust aperture in fluid communication with a vacuum reservoir with a static pressure lower than that at the apertures, wherein the delivery aperture and the exhaust aperture have a length nonuniformity that is less than 0.4%,
• wherein the delivery aperture and the exhaust aperture are formed from bonded silicon wafers and a bisection of channels etched into the face of a silicon wafer including a buried oxide layer, and
• wherein the channels that form at least one from the group consisting of:
• the delivery aperture and the exhaust aperture extend completely through one of a silicon layer of a wafer with a buried oxide layer and do not extend into the silicon layer on the other side of the buried oxide layer of that wafer.