Pixel with dual-PD layout
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChi-Hsien Chung, Tzu-Jui Wang, Chia-Chi Hsiao, Chen-Jong Wang, Dun-Nian Yaung
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChi-Hsien Chung, Tzu-Jui Wang, Chia-Chi Hsiao, Chen-Jong Wang, Dun-Nian Yaung
Estimating the term…
Various embodiments of the present disclosure are directed towards an image sensor comprising a pixel with a dual-PD layout for enhanced scaling down. The pixel spans a first integrated circuit (IC) die and a second IC die stacked with the first IC die. The pixel comprises a plurality of photodetectors in the first IC die, and further comprises a plurality of pixel transistors split amongst the first IC die and the second IC die. The plurality of photodetectors are grouped into one or more pairs, each having the dual-PD layout. A DTI structure completely and individually surrounds the plurality of photodetectors, and further extends completely through a substrate within which the plurality of photodetectors are arranged. As such, the DTI structure completely separates the plurality of photodetectors from each other.
A method for forming an image sensor, comprising:
A method for forming an image sensor, comprising:
A method for forming an image sensor, comprising:
Dependencies are inferred from the claim text.