Solid-state imaging device and method for producing solid-state imaging device
AssigneeNational University Corporation Shizuoka University
InventorsNobukazu Teranishi, Atsushi Ono, Kazuma Hashimoto, Takahito Yoshinaga
Life of this patent
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Abstract
Each pixel 8 constituting a solid-state imaging device 1 includes a light scattering unit 27 receiving incident light L1 and generating absorbed light L2 including scattered light, and a photoelectric conversion unit 26 receiving the absorbed light L2 from a light input surface 26a and generating a signal voltage corresponding to the received absorbed light L2. The light scattering unit 27 includes a plurality of metal structures 27a disposed with a predetermined cycle length. The light scattering unit 27 generates, as the scattered light, diffracted light caused by plasmons corresponding to the incident light L1.
Claims17
A solid-state imaging device including a plurality of pixels,
- wherein each of the pixels includes
- a light scattering unit receiving incident light and generating absorbed light including scattered light, and
- a photoelectric conversion unit receiving the absorbed light from a light input surface and generating a signal voltage corresponding to the received absorbed light, and
- the light scattering unit includes a plurality of metal structures disposed with a predetermined cycle length and generates, as the scattered light, diffracted light of propagating light caused by plasmons not in locally enhanced field mode corresponding to the incident light,
- the cycle length of the plurality of metal structures is a variable P,
- a real part of a refractive index of the photoelectric conversion unit is a variable n,
- a wavelength of the incident light is a variable λ,
- an order l is 1 or 2, and
- the variable P, the variable n, the variable λ, and the order l satisfy Expression (1),
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Dependencies are inferred from the claim text.