3D source and drain contacts tuned for vertically stacked PMOS and NMOS

An integrated circuit structure comprising:

• a first transistor device comprising a first source or drain contact coupled to a first source or drain region and a second source or drain contact coupled to a second source or drain region,
• the first source or drain contact and the second source or drain contact each consisting of tungsten or cobalt;
• and
• a second transistor device comprising a third source or drain contact coupled to a third source or drain region and a fourth source or drain contact coupled to a fourth source or drain region, the third source or drain contact and the fourth source or drain contact each consisting of molybdenum,
• wherein the first device and the second device are arranged in a vertical device stack.

An integrated circuit, comprising:

• a first device comprising (i) a first source region, (ii) a first drain region, (iii) a first nanoribbon laterally extending from the first source region to the first drain region, (iv) a first source contact extending within the first source region, and (v) a first drain contact extending within the first drain region;
• and
• a second device comprising (i) a second source region, (ii) a second drain region, (iii) a second nanoribbon laterally extending from the second source region to the second drain region, (iv) a second source contact extending within the second source region, and (v) a second drain contact extending within the second drain region,
• wherein the first device and the second device are arranged in a vertical device stack,
• wherein the first source contact and the first drain contact comprise a first conductive material that induces compressive strain within the first nanoribbon, and the second source contact and the second drain contact comprise a second conductive material that induces tensile strain within the second nanoribbon, wherein the first conductive material consists of tungsten or cobalt, and the second conductive material consists of molybdenum.