Micro speaker structure including diaphragm with locally thinner regions and method for forming the same

Abstract

A micro speaker structure is provided, including a substrate, a diaphragm, a coil, a carrier board, and a permanent magnetic element. The substrate has a hollow chamber. The diaphragm is disposed over the substrate and covers the hollow chamber. The diaphragm includes an etching pattern recessed form a first surface of the diaphragm. Etching patterns are used to increase sound pressure level at special frequency range. The coil is embedded in the diaphragm. The carrier board is disposed on the bottom surface of the substrate. The permanent magnetic element is disposed on the carrier board and in the hollow chamber. The first surface of the diaphragm faces the permanent magnetic element.

Dependencies are inferred from the claim text.