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US 12,744,510 B2Granted
Vibrator device with semiconductor element and vibrator
AssigneeSeiko Epson Corporation
InventorShinya Aoki
Life of this patent
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Abstract
A vibrator device includes a base, a semiconductor element, and a vibrator. The semiconductor element is flip-chip mounted on the base, the vibrator is mounted on the semiconductor element via an adhesive, a first coupling wire is formed on the base, the semiconductor element and the first coupling wire are electrically coupled via a first bump, the first coupling wire and the vibrator are electrically coupled via a first wire, and the semiconductor element and the vibrator are covered by a mold portion placed on the base.
Claims4
A vibrator device comprising:
- a base;
- a semiconductor element flip-chip mounted on the base;
- a vibrator mounted on the semiconductor element via an adhesive;
- a first coupling wire formed on the base;
- a first bump electrically coupling the semiconductor element and the first coupling wire;
- a first wire electrically coupling the first coupling wire and the vibrator;
- and
- a mold portion placed on the base and covering the semiconductor element and the vibrator, wherein
- an external output terminal is formed on the base,
- the semiconductor element is electrically coupled to the external output terminal,
- the vibrator has a first excitation electrode, and
- the first coupling wire and the first excitation electrode are electrically coupled via the first wire, wherein
- the semiconductor element is mounted on the base via a second bump and a third bump,
- a second coupling wire and a third coupling wire are formed on the base,
- the semiconductor element is electrically coupled to the second coupling wire via the second bump and electrically coupled to the third coupling wire via the third bump,
- the vibrator has a second excitation electrode,
- the second coupling wire and the second excitation electrode are electrically coupled via a second wire,
- the third coupling wire is electrically coupled to the external output terminal, and
- in a plan view, the first coupling wire and the second coupling wire are placed at one side of the vibrator and the third coupling wire is placed at the other side of the vibrator.
16 more elements
A vibrator device comprising:
- a base;
- a semiconductor element flip-chip mounted on the base;
- a vibrator mounted on the semiconductor element via an adhesive;
- a first bump electrically coupling the semiconductor element and the base;
- a first wire electrically coupling the base and the vibrator;
- and
- a mold portion placed on the base and covering the semiconductor element and the vibrator, wherein
- the semiconductor element is mounted on the base via a second bump and a third bump,
- an external output terminal is formed on the base,
- the semiconductor element is electrically coupled to the external output terminal,
- the second bump and the third bump electrically coupling the semiconductor element and the base,
- the vibrator has a first excitation electrode and a second excitation electrode,
- the base and the first excitation electrode are electrically coupled via the first wire, and
- the base and the second excitation electrode are electrically coupled via a second wire.
11 more elements
Dependencies are inferred from the claim text.