Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorKatsuya Daimon
Life of this patent
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Abstract
An acoustic wave device includes a piezoelectric substrate and an IDT electrode including electrode fingers. A portion of the IDT electrode in which the electrode fingers overlap with each other in a propagation direction of an acoustic wave is an intersecting region. The intersecting region includes a central region on a center side in an extending direction of the electrode fingers, and a first region and a second region located on respective sides of the central region in the extending direction of the electrode fingers. In the central region, a dielectric film is provided between the electrode fingers, and the dielectric film does not overlap with at least a portion of the electrode fingers when seen in plan view.
Claims20
An acoustic wave device comprising:
- a piezoelectric substrate including a piezoelectric layer;
- and
- an IDT electrode which is provided on the piezoelectric layer and includes:
- a first busbar and a second busbar opposed to each other;
- and
- a plurality of electrode fingers each including one end connected to one of the first busbar and the second busbar;
- wherein
- a portion of the IDT electrode in which at least one of the electrode fingers connected to the first busbar and at least one of the electrode fingers connected to the second busbar overlap with each other in a propagation direction of an acoustic wave is an intersecting region, the electrode fingers being adjacent to each other;
- the intersecting region includes a central region located on a center side in an extending direction of the plurality of electrode fingers, and a first region and a second region located on respective sides of the central region in the extending direction of the plurality of electrode fingers;
- the acoustic wave device further includes a dielectric film located in the central region;
- and
- in the central region, the dielectric film is provided between the plurality of electrode fingers, and, in the central region, the dielectric film does not overlap with at least a portion of the plurality of electrode fingers when seen in plan view.
Dependencies are inferred from the claim text.