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US 12,743,075 B2Granted
Information collection device for substrate processing apparatus
AssigneeTokyo Electron Limited
InventorsYutai Matsuhashi, Tsutomu Sugawara, Shigehisa Hayashi, Tadashi Enomoto
Life of this patent
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Abstract
An information collection device includes a power supply unit that supplies power to operate the information collection device; an input unit that is connected to a sensor capable of detecting a state of the substrate processing apparatus and inputs sensor data indicating the state of the substrate processing apparatus detected by the sensor, a relay unit that relays transmission of the sensor data; and a control unit that collects the sensor data input by the input unit through the relay unit.
Claims14
An information collection device comprising:
- a power supply configured to supply power to operate the information collection device;
- an input port connected to a sensor capable of detecting a state of a substrate processing apparatus and configured to input sensor data indicating the state of the substrate processing apparatus detected by the sensor,
- a relay configured to relay transmission of the sensor data;
- and
- a controller configured to collect the sensor data input by the input port through the relay,
- wherein the information collection device is separately provided from the substrate processing apparatus, and
- the sensor connected to the input port includes one or more second sensors that are additionally installed on the substrate processing apparatus and that are different from first sensors previously attached to the substrate processing apparatus and connected to a control device of the substrate processing apparatus.
4 more elements
Dependencies are inferred from the claim text.