System and method for semiconductor fabricating process

A method, comprising:

• building a connection between an output port of a first auxiliary apparatus and a first communication port of a box device by a first cable;
• building a connection between an output port of a second auxiliary apparatus and a second communication port of the box device by a second cable, wherein the output port of the second auxiliary apparatus is of a different type from the output port of the first auxiliary apparatus, and the second communication port of the box device is of a same type as the first communication port of the box device;
• when the first cable builds the connection between the first auxiliary apparatus and the box device, and the second cable builds the connection between the second auxiliary apparatus and the box device, automatically identifying, by the box device, a type of the first auxiliary apparatus and a type of the second auxiliary apparatus;
• monitoring, by a display device coupled to the box device, a first operation data from the first auxiliary apparatus and a second operation data from the second auxiliary apparatus;
• and
• when the first operation data is out of a first acceptable range, displaying a warning message on the display device.

A system, comprising:

• a first pump apparatus, providing a first operation data according to a first digital protocol format in a first communication protocol;
• a second pump apparatus, providing a second operation data according to a second digital protocol format in the first communication protocol;
• a box device, comprising a computing module, a first communication port, a second communication port, a first cable, and a second cable, wherein when the first cable is connected between the first pump apparatus and the first communication port, and the second cable is connected between the second pump apparatus and the second communication port, the computing module is configured to automatically identify a type of the first pump apparatus and a type of the second pump apparatus, wherein the computing module is further configured for receiving the first operation data according to the first digital protocol format and the second operation data according to the second digital protocol format in the first communication protocol;
• and
• a display device coupled to the box device, wherein the display device is configured for displaying the first operation data and the second operation data.