Substrate edge patterning techniques
AssigneeOnto Innovation Inc.
InventorsKeith F. Best, Mark Howard, Douglas A. Brown, Guray Tas
Life of this patent
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AssigneeOnto Innovation Inc.
InventorsKeith F. Best, Mark Howard, Douglas A. Brown, Guray Tas
Estimating the term…
Various techniques to quickly image one or more edge regions of a substrate panel without imaging other regions of the substrate panel, such as areas of the substrate panel that have already been exposed to ultraviolet (UV) light. In some examples, an illumination mask assembly can be coupled to a clamp assembly and used to image at least one edge region of the substrate panel, such as an edge region including one or more dummy patterns. For example, the substrate panel can be clamped using the clamp assembly in order to immerse the substrate panel into a plating bath. Before immersion, the illumination mask assembly can image one or more edge regions of the substrate panel, such as to image the various dummy patterns in a layer of the substrate panel.
A panel edge patterning system for imaging one or more edge regions of a substrate panel, the panel edge patterning system comprising:
A method for imaging portions of a substrate panel, the method comprising:
A panel edge patterning system for imaging an edge region of a substrate panel, the panel edge patterning system comprising:
Dependencies are inferred from the claim text.