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US 12,742,995 B2Granted
Metasurface devices with multilayer passivation coatings
AssigneeLumotive, LLC
InventorsErik Edward Josberger, Lie “Larry” Zhao, Linda Gail Conway, Gleb M. Akselrod
Life of this patent
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Abstract
A tunable optical device includes a dielectric substrate with an array of metallic extension elements extending therefrom. The metallic extension elements are spaced closely together with subwavelength gaps between them. A multilayer passivation coating is applied to at least the opposing sidewalls and the top wall of each metallic extension element.
Claims27
A tunable optical device, comprising:
- a dielectric substrate;
- an array of metallic extension elements extending from the dielectric substrate and spaced from one another by less than a wavelength of an operational bandwidth to form subwavelength gaps between adjacent metallic extension elements, wherein each metallic extension element comprises a metal core having a base wall, opposing sidewalls, and a top wall;
- a conductive barrier material positioned between the base wall of each metal core and the dielectric substrate;
- a tunable dielectric material that has a tunable refractive index positioned within the gaps between adjacent metallic extension elements;
- and
- a multilayer passivation coating applied to at least the opposing sidewalls and the top wall of the metal core of each respective metallic extension element, the multilayer passivation coating comprising:
- a first passivation coating that exhibits strong adhesion properties to the metal core and prevents corrosion of the metal core;
- and
- a second passivation coating with surface characteristics that facilitate alignment of the tunable dielectric material to increase a switching speed thereof.
6 more elements
A tunable optical device, comprising:
- a dielectric substrate;
- an array of copper pillars extending from the dielectric substrate and spaced from one another by less than a wavelength of an operational bandwidth to form subwavelength gaps between adjacent copper pillars, wherein each copper pillar has a base wall, opposing sidewalls, and a top wall;
- a conductive barrier material positioned between the base wall of each copper pillar and the dielectric substrate, wherein the conductive barrier material comprises one of tantalum, tantalum nitride, and titanium nitride;
- liquid crystal positioned within the gaps between adjacent copper pillars;
- and
- a multilayer passivation coating applied to at least the opposing sidewalls and the top wall of each copper pillar, the multilayer passivation coating comprising:
- a first passivation coating of SiN adhered to the copper pillars;
- and
- a second passivation coating adhered to the first passivation coating of SiN,
- wherein the second passivation coating is in contact with the liquid crystal and prevents the liquid crystal from contacting the first passivation coating of SiN.
7 more elements
A tunable optical device, comprising:
- a dielectric substrate;
- an array of metallic extension elements extending from the dielectric substrate and spaced from one another by less than a wavelength of an operational bandwidth to form subwavelength gaps between adjacent metallic extension elements, wherein each metallic extension element comprises a metal core having a base wall, opposing sidewalls, and a top wall;
- a tunable dielectric material that has a tunable refractive index positioned within the gaps between adjacent metallic extension elements;
- and
- a multilayer passivation coating applied to at least the opposing sidewalls and the top wall of the metal core of each respective metallic extension element, the multilayer passivation coating comprising:
- a first passivation coating that:
- (i) exhibits strong adhesion properties to the metal core, and
- (ii) prevents corrosion of the metal core;
- and
- a second passivation coating with surface characteristics that are at least:
- (i) resistant to damage by manufacturing processes associated with deposition of the tunable dielectric material, and
- (ii) resistant to damage by the tunable dielectric material.
9 more elements
Dependencies are inferred from the claim text.