Optical phased array device and method of manufacture
AssigneesThe Regents of the University of Michigan, Yangzhou Qunfa Heat Exchanger Co. Ltd.
InventorsYating Zhuang, Dachuan Wu, Ya Sha Yi
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AssigneesThe Regents of the University of Michigan, Yangzhou Qunfa Heat Exchanger Co. Ltd.
InventorsYating Zhuang, Dachuan Wu, Ya Sha Yi
Estimating the term…
An optical phased array device and method for manufacturing an optical phased array for the optical phased array device. The method includes: forming a base layer of a waveguide array on a base substrate, determining a waveguide pattern defining a plurality of waveguide paths, and fabricating a pattern layer of the waveguide array on top of the base layer of the waveguide array according to the determined waveguide pattern. The plurality of waveguide paths branch from a common path and terminate at a plurality of edge emitters, where the plurality of edge emitters are spaced apart from one another along a first axis that extends in the first dimension along an edge of the optical phased array. The spacing of multiple ones of the plurality of emitters along the first axis is aperiodic.
An optical phased array device, comprising:
A method of manufacturing an optical phased array for an optical phased array device, comprising:
A method of manufacturing an optical phased array for an optical phased array device, comprising:
Dependencies are inferred from the claim text.