Hybrid bonding with photonic integrated circuits for high bandwidth reticle stitching of reticle sized integrated circuit dies
AssigneeIntel Corporation
InventorsSagar Suthram, Debendra Mallik, John Heck, Pushkar Sharad Ranade, Ravindranath Vithal Mahajan, Thomas Liljeberg, Wilfred Gomes, Abhishek A. Sharma, Tahir Ghani
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