System and method for automatic probe card replacement

A probe card replacement station comprising:

• a drawer unit comprising a cassette of probe cards;
• a probe card exchanger configured to transfer the probe cards from the cassette to a probe card manipulator;
• and
• a controller configured to choose, from the probe cards in the cassette, a new probe card to replace a used probe card of a test system, wherein the new probe card comprises an array of flexible probes configured to flex or bend on physical contact with a device under test (DUT) to measure one or more electrical properties of the DUT by moving laterally along a surface of the DUT.

A test system comprising:

• a probe card manipulator configured to move between a measurement position for measuring a wafer and a replacement position for replacing a used probe card of the test system;
• a drawer unit comprising a cassette of probe cards;
• a controller configured to choose, from the probe cards in the cassette, a new probe card to replace the used probe card, wherein the new probe card comprises an array of flexible probes configured to flex or bend on physical contact with a device under test (DUT) to measure one or more electrical properties of the DUT by moving laterally along a surface of the DUT;
• and
• a probe card exchanger configured to transfer the new probe card from the cassette to the manipulator.