Imaging system and imaging inspection apparatus including the same

An imaging inspection apparatus comprising:

• a measurement target;
• a light source configured to irradiate measurement light toward the measurement target;
• a first polarization structure configured to polarize the measurement light into first polarized light;
• a first power supply connected to the first polarization structure;
• a meta-lens on which the first polarized light is incident;
• a second polarization structure configured to convert the first polarized light that passes through the meta-lens into second polarized light;
• a second power supply connected to the second polarization structure;
• and
• an image sensor configured to sense the second polarized light,
• wherein
• the measurement target is between the meta-lens and the first polarization structure,
• the measurement target includes a center area and an edge area surrounding the center area,
• responsive to a first voltage being applied to the first polarization structure by the first power supply and a second voltage being applied to the second polarization structure by the second power supply, and the second voltage being different than the first voltage, the center area of the measurement target is imaged,
• the first polarization structure includes a first polarizing plate and a first liquid crystal, and the first power supply is connected to the first liquid crystal and the first voltage applied to the first polarization structure is applied to the first liquid crystal, and
• the second polarization structure includes a second polarizing plate and a second liquid crystal, and the second power supply is connected to the second liquid crystal and the second voltage applied to the second polarization structure is applied to the second liquid crystal.

An imaging inspection apparatus comprising:

• a measurement target;
• a light source configured to irradiate measurement light toward the measurement target;
• a first polarizing plate configured to polarize the measurement light into first polarized light;
• a meta-lens on which the first polarized light is incident;
• a first liquid crystal between the first polarizing plate and the meta-lens;
• a first power supply connected to the first liquid crystal, and the first power supply is configured to apply a first voltage to the first liquid crystal;
• a second polarizing plate configured to convert the first polarized light that passes through the meta-lens into second polarized light;
• a second liquid crystal between the second polarizing plate and the meta-lens;
• a second power supply connected to the second liquid crystal, and the second power supply configured to apply a second voltage different from the first voltage to the second liquid crystal;
• an objective lens between the second liquid crystal and the meta-lens;
• and
• an image sensor configured to sense the second polarized light,
• wherein the measurement target is between the meta-lens and the first liquid crystal,
• wherein the measurement target includes a center area and an edge area surrounding the center area, and
• wherein the first power supply and the second power supply are configured to adjust each of a first intensity of the first voltage and a second intensity of the second voltage to image the center area of the measurement target and the edge area of the measurement target.