Beam profiler certification and calibration

A computer-implemented method for calibrating a beam profiler, the computer-implemented method comprising:

• sending one or more control signals to a laser to emit laser light from the laser into an integrating sphere configured to uniformly scatter the laser light off of an internal surface of the integrating sphere to generate diffuse laser light, wherein the diffuse laser light is directed to be incident on an array of pixels of a beam sensor of the beam profiler;
• receiving an expected intensity value of the diffuse laser light from a sensor system arranged to observe the diffuse laser light within the integrating sphere;
• receiving a plurality of native intensity values of the diffuse laser light output by the array of pixels of the beam sensor of the beam profiler;
• and
• calibrating the beam profiler based at least on differences between the plurality of native intensity values of the diffuse laser light output by the array of pixels of the beam sensor and the expected intensity value of the diffuse laser light output by the sensor system.

A tool comprising:

• a laser configured to emit laser light;
• an integrating sphere including an input port and an output port, the integrating sphere being configured to receive the laser light emitted from the laser via the input port and uniformly scatter the laser light off of an internal surface of the integrating sphere to generate diffuse laser light;
• a sensor system arranged to observe the diffuse laser light within the integrating sphere and output an expected intensity value of the diffuse laser light;
• an interface configured to align a beam profiler with the output port of the integrating sphere to direct the diffuse laser light to be incident on an array of pixels of a beam sensor of the beam profiler, wherein array of pixels of the beam sensor is configured to output a plurality of native intensity values of the diffuse laser light;
• and
• a computing system including a logic subsystem and a storage subsystem holding instructions executable by the logic subsystem to:
• receive the expected intensity value of the diffuse laser light output by the sensor system;
• receive the plurality of native intensity values of the diffuse laser light output by the array of pixels of the beam sensor;
• certify that the beam profiler is functioning properly based at least on the plurality of native intensity values of the diffuse laser light output by the array of pixels of the beam sensor correlating to the expected intensity value of the diffuse laser light output by the sensor system;
• and
• calibrate the beam profiler based at least on differences between the plurality of native intensity values of the diffuse laser light output by the array of pixels of the beam sensor and the expected intensity value of the diffuse laser light output by the sensor system.