US 12,742,695 B2 · Pressure sensor device with a progressive stopper

Abstract

A progressive stopper for a pressure sensing element is able to redistribute and reduce the stress of a diaphragm exposed to high pressure via multi-step contacts, such as at least dual contacts, where the diaphragm (designed for detecting pressure within a defined pressure range) is enabled to withstand much higher pressures above of the defined pressure range, such that the progressive stopper prevents catastrophic failure of the diaphragm. The progressive stopper is created to redistribute and reduce stress on the diaphragm significantly and effectively. The progressive stopper does not limit the output of the pressure sensing element such that the pressure sensing element is able to maintain the output voltage above the maximum output voltage of the defined pressure range when the diaphragm is exposed to high pressures with reduced stresses and strains.

Claims10

Dependent claims

A pressure sensing element, comprising:

a support substrate;
an intermediate layer bonded to the support substrate;
a diaphragm substrate bonded to the intermediate layer;
and
a diaphragm being part of the diaphragm substrate;
at least one progressive stopper in contact with at least one of the diaphragm substrate or the support substrate when pressure applied to the diaphragm is above a first predetermined value, the at least one progressive stopper further comprising:
a first stopper ring connected to the diaphragm substrate;
and
a second stopper ring connected to the diaphragm substrate such that the first stopper ring circumscribes, is concentric with, and is in contact with the second stopper ring;
wherein only the first stopper ring contacts the support substrate when the pressure applied to the diaphragm is above the first predetermined value, and both the first stopper ring and the second stopper ring contact the support substrate when the pressure applied to the diaphragm is above a second predetermined value.

7 more elements

A pressure sensor assembly, comprising:

a housing having a port;
a support substrate located in a cavity in the housing;
a sealing glass layer bonded to the support substrate, the sealing glass layer located in the cavity in the housing;
a diaphragm substrate bonded to the sealing glass layer, the diaphragm substrate located in the cavity in the housing;
a diaphragm being part of the diaphragm substrate, the diaphragm selectively exposed to fluid pressure in the port;
a plurality of resistors coupled to the diaphragm such that the plurality of resistors are located between the diaphragm substrate and the support substrate;
and
at least one progressive stopper integrally formed with one of the diaphragm substrate or the support substrate, the at least one progressive stopper further comprising:
a first stopper ring connected to the diaphragm substrate;
a second stopper ring connected to the diaphragm substrate such that the first stopper ring circumscribes, is concentric with, and is in contact with the second stopper ring;
wherein only the first stopper ring is in contact with the support substrate when pressure applied to the diaphragm is above a first predetermined value, and both the first stopper ring and the second stopper ring are in contact with the support substrate when pressure applied to the diaphragm is above a second predetermined value.

8 more elements

Dependencies are inferred from the claim text.

Pressure sensor device with a progressive stopper

Life of this patent

Pressure sensor device with a progressive stopper

Life of this patent

Abstract

Claims10