Flow rate calculation device and flow rate calculation method
AssigneeHORIBA STEC, Co., Ltd.
InventorOsamu Horinouchi
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AssigneeHORIBA STEC, Co., Ltd.
InventorOsamu Horinouchi
Estimating the term…
A flow rate calculation device includes: a specific flow path and a bypass flow path which are provided to branch from a main flow path; a first fluid resistance element which is provided in the specific flow path; a second fluid resistance element which is provided in the bypass flow path; a container which is arranged in the specific flow path; a pressure sensor which detects a pressure in the container; and a flow rate calculation unit. The flow rate calculation unit calculates the flow rate of a first branch fluid diverted to the specific flow path based on a change in the pressure in the container, and calculates the flow rate of the fluid flowing through the main flow path based on the calculated flow rate of the first branch fluid and a diversion ratio determined according to the first fluid resistance element and the second fluid resistance element.
A flow rate calculation device that calculates a flow rate of a fluid flowing through a main flow path, the flow rate calculation device comprising:
A flow rate calculation method comprising:
Dependencies are inferred from the claim text.