Detecting contamination of a cryogenic refrigerant in a cryogenic refrigeration system
AssigneeEdwards Vacuum LLC
InventorsPeter F. Moran, Steven Edward Zacharski
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AssigneeEdwards Vacuum LLC
InventorsPeter F. Moran, Steven Edward Zacharski
Estimating the term…
A sensor for detecting contamination of a cryogenic refrigerant in a cryogenic refrigeration system, a method and a refrigeration system are disclosed. The sensor comprises: an inlet for coupling to a cryogenic refrigerant flow path in the cryogenic refrigeration system and a thermal conductivity detector in fluid communication with the inlet. The thermal conductivity detector is configured to generate a signal indicative of a detected thermal conductivity of the cryogenic refrigerant received from the cryogenic refrigeration system when the sensor is coupled thereto. The sensor also comprises circuitry configured to convert the thermal conductivity signal to an indication of contamination of the cryogenic refrigerant; and an output configured to output the indication of contamination of the cryogenic refrigerant.
A sensor system for refrigeration system, said sensor system comprising:
A method of detecting contamination of a refrigerant in a refrigeration system, said method comprising:
Dependencies are inferred from the claim text.