Adapter plate to attach turbo pumps to process modules

A system comprising:

• a process module configured to process a semiconductor substrate, the process module having an opening at a lower end of the process module and including a poppet valve arranged in the process module directly above the opening;
• a pump configured to operate in conjunction with the poppet valve to evacuate gases from the process module, wherein the poppet valve is positioned between the pump and the process module;
• an adapter plate arranged above the pump and below the opening at the lower end of the process module, the adapter plate including an inner cavity coincident with the opening and an outer perimeter smaller than the lower end of the process module, the adapter plate including:
• a first set of bores arranged around the inner cavity;
• and
• a second set of bores arranged along the outer perimeter;
• first fasteners fastening the pump to the adapter plate through the first set of bores;
• and
• second fasteners fastening the adapter plate to the process module through the second set of bores.