Device and method for producing a monocrystalline silicon rod in a zone-melting pulling system
AssigneeSiltronic AG
InventorPatrick Moos
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AssigneeSiltronic AG
InventorPatrick Moos
Estimating the term…
A device holds a feed rod in a pulling installation for zone melting. The device has an upper part, a lower part, and three length-adjustable spacer elements. The upper part includes a connecting element, which serves for the fitting into the pulling installation; and a radial alignment element that radially aligns the upper part in the pulling installation. The lower part has three gripping arms. The three gripping arms are formed such that one end fits into a groove in the lateral surface of the feed rod and another end is attached rotatably. The length-adjustable spacer elements are attached to the upper part such that they exert force respectively onto a gripping arm. The upper part and the lower part are connected by a bearing. The bearing has the effect that a connection is radially with a form fit in a self-centering and detachable manner with respect to one another.
A method for pulling a monocrystalline rod from silicon in a pulling installation for zone melting, the method comprising:
Dependencies are inferred from the claim text.