Cleaning liquid and method for cleaning substrate
AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsYukihisa Wada, Kohei Serizawa, Choitsu Go, Kazumasa Wakiya
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AssigneeTokyo Ohka Kogyo Co., Ltd.
InventorsYukihisa Wada, Kohei Serizawa, Choitsu Go, Kazumasa Wakiya
Estimating the term…
A cleaning liquid for cleaning a substrate having a first metal atom-containing layer that contains ruthenium and a second metal atom-containing layer that contains a metal atom other than ruthenium, both of the layers contacting each other, and at least one of the first metal atom-containing layer and the second metal atom-containing layer is exposed on a surface. The cleaning liquid includes at least one of a compound represented by General Formula (a1), a hydrate of the compound, and a salt of the compound, and at least one amine other than the hydrazine compound and a quaternary hydroxide. In General Formula (a1), R1 and R2 represent an organic group including no carbonyl group or a hydrogen atom
A cleaning liquid for cleaning a substrate having a first metal atom-containing layer that contains ruthenium and a second metal atom-containing layer that contains a metal atom other than ruthenium, both the layers being present in contact with each other, where at least one of the first metal atom-containing layer and the second metal atom-containing layer is exposed on a surface, the cleaning liquid comprising:
A cleaning liquid for cleaning a substrate having a first metal atom-containing layer that contains a noble metal atom and a second metal atom-containing layer that contains a base metal atom, both the layers being present in contact with each other, where at least one of the first metal atom-containing layer and the second metal atom-containing layer is exposed on a surface, the cleaning liquid comprising:
Dependencies are inferred from the claim text.