Water quality measurement system and water quality measurement method
AssigneeNomura Micro Science Co., Ltd.
InventorsYukio Noguchi, Akira Tanji
Life of this patent
Estimating the term…
Abstract
A water quality measurement system 10 includes: a first pipe 11 through which a first treated water flows; a first branch pipe 11a branching from the first pipe 11 and having a first valve V11; a second pipe 12 through which a second treated water flows; a second branch pipe 12a branching from the second pipe 12 and having a second valve V12; a third pipe 13 connected to the first pipe 11 and the second pipe 12 and through which the first treated water and the second treated water flow; and a water quality measurement device 14 configured to measure a water quality of a treated water flowing through the third pipe 13.
Claims14
A water quality measurement system, comprising:
- a first pipe through which a first treated water flows, the first treated water being a first ultra pure water;
- a first branch pipe branching from the first pipe, the first branch pipe having a first valve;
- a second pipe through which a second treated water flows, the second treated water being a second ultra pure water;
- a second branch pipe branching from the second pipe, the second branch pipe having a second valve;
- a third pipe connected to a connection between the first pipe and the second pipe and through which the first treated water and the second treated water flow;
- and
- a water quality measurement device configured to measure a water quality of a treated water flowing through the third pipe, wherein:
- no switching valve is provided on a flow path of the first treated water to the water quality measurement device and on a flow path of the second treated water to the water quality measurement device, and
- the third pipe has no valve on its entirety including the connection.
A water quality measurement method, comprising:
- a first supply step of supplying a first treated water into a first pipe with a first branch pipe having a first valve, the first treated water being a first ultra pure water;
- a second supply step of supplying a second treated water into a second pipe with a second branch pipe having a second valve, the second treated water being a second ultra pure water;
- a switching step of closing the first valve and opening the second valve, or opening the first valve and closing the second valve, to allow one of the first treated water and the second treated water to flow through a third pipe connected to a connection between the first pipe and the second pipe;
- and
- a water quality measurement step of measuring a water quality of the first treated water or the second treated water flowing through the third pipe, wherein:
- no switching valve is provided on a flow path of the first treated water to a water quality measurement device and on a flow path of the second treated water to a water quality measurement device, and
- the third pipe has no valve on its entirety including the connection.
Dependencies are inferred from the claim text.