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US 12,741,827 B2Granted
Substrate holding hand and substrate conveyor robot
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorShinya Kinoshita
Life of this patent
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Abstract
A substrate-holding hand includes a plurality of blades, a linkage for supporting the plurality of blades, and a force applier arranged for applying a force to the linkage in a direction that increases a pitch between the blades.
Claims8
A substrate-holding hand comprising:
- a plurality of blades for supporting substrates and stacked with the plurality of blades being spaced away from each other;
- a linkage for supporting the plurality of blades to change a pitch between the blades, the linkage including a first link, a plurality of second links and a third link, the third link being directly connected to the first link and the second links;
- a driver configured to drive the linkage;
- and
- a force applier separate from the driver, the force applier including a including a biaser configured to apply a biasing force between the first link and the third link in a direction that increases the pitch between the blades and that acts against weights of the blades, wherein
- the driver is configured to change the pitch between the blades with the biasing force being applied, and
- the force that is applied by the biaser is balanced against the weights of the blades without a driving force of the driver being applied.
4 more elements
A substrate-conveying robot comprising:
- a robot arm;
- and
- a substrate-holding hand arranged in a distal end part of the robot arm, wherein the substrate-holding hand includes
- a plurality of blades for supporting substrates and stacked with the plurality of blades being spaced away from each other,
- a linkage for supporting the plurality of blades to change a pitch between the blades, the linkage including a first link, a plurality of second links and a third link, the third link being directly connected to the first link and the second links,
- a driver configured to drive the linkage, and
- a force applier separate from the driver, the force applier including a including a biaser configured to apply a biasing force between the first link and the third link in a direction that increases the pitch between the blades and that acts against weights of the blades, wherein
- the driver is configured to change the pitch between the blades with the biasing force being applied, and
- the force that is applied by the biaser is balanced against the weights of the blades without a driving force of the driver being applied.
6 more elements
Dependencies are inferred from the claim text.