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US 12,741,463 B2Granted
Liquid ejecting head and liquid ejecting apparatus
AssigneeSeiko Epson Corporation
InventorsMasaki Mori, Motoki Takabe, Eiju Hirai
Life of this patent
Estimating the term…
Abstract
A liquid ejecting head includes: a wiring substrate; a plurality of pressure chambers that accommodate a liquid and communicate with nozzles; a drive element that is electrically coupled to the wiring substrate and changes a pressure in the pressure chamber; and a humidity detection section that is electrically coupled to the wiring substrate and is disposed for detection of humidity.
Claims19
A liquid ejecting head comprising:
- a wiring substrate;
- a plurality of pressure chambers that accommodate a liquid and communicate with nozzles;
- a drive element that is electrically coupled to the wiring substrate and changes a pressure in the pressure chamber, the drive element being a piezoelectric element including a first drive electrode, a second drive electrode, and a piezoelectric body, the piezoelectric body being provided between the first drive electrode and the second drive electrode in a lamination direction in which the first drive electrode, the piezoelectric body, and the second drive electrode are laminated;
- a humidity detection section that is electrically coupled to the wiring substrate and is disposed for detection of humidity:
- a vibration plate that is provided on one side of the lamination direction with respect to the piezoelectric element and is deformed by driving of the piezoelectric element;
- and
- a pressure chamber substrate that is provided on one side of the lamination direction with respect to the vibration plate and is provided with the plurality of pressure chambers, wherein
- the humidity detection section includes
- an interlayer that is laminated on at least one of the piezoelectric body, the vibration plate, or the pressure chamber substrate and whose resistance or capacitance changes according to humidity,
- a first detection electrode that is in contact with the interlayer, and
- a second detection electrode that is in contact with the interlayer and faces the first detection electrode.
8 more elements
Dependencies are inferred from the claim text.