Method for producing a detachment region in a solid-state body

A method for producing a detachment region in a solid-state body, the method comprising:

• providing a solid body that consists of a chemical compound, the chemical compound comprising a combination of elements selected from the group consisting of the 3rd, 4th and 5th main groups and subgroup 12 of the Periodic Table of the Elements;
• providing a laser light source;
• and
• exposing the solid body to laser beams from the laser light source,
• wherein the laser beams penetrate into the solid body via a main surface of the solid body,
• wherein the laser beams are applied in a defined manner on a predefined portion of the solid body within the solid body to form a detachment region,
• wherein the application of the laser beams successively creates multiple modifications in a crystal lattice of the solid body;
• wherein the crystal lattice, as a result of the modifications, fissures in a subcritical manner at least in a portion in each case in regions that surround the modifications, wherein the subcritical fissures propagate mainly in a plane which is parallel or in a defined alignment and essentially parallel with respect to the main surface,
• wherein the subcritical fissures in the region of the modifications define the detachment region or multiple partial detachment regions,
• wherein the subcritical fissures join to form a main fissure, and
• wherein the main fissure separates a solid layer from the solid body.