Cleaning system and method for a curved substrate
AssigneeSamsung Display Co., Ltd.
InventorsJinwook Yang, Se Hun Park, Jongwon Park
Life of this patent
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AssigneeSamsung Display Co., Ltd.
InventorsJinwook Yang, Se Hun Park, Jongwon Park
Estimating the term…
A curved target substrate cleaning system includes a pressure-type cleaning unit for cleaning a cleaning area of a target substrate having a curved surface by applying pressure to the cleaning area, a support body detachably supporting the pressure cleaning unit at a predetermined height with respect to a cleaning area of the target substrate having the curved portion, a cleaning area flat maintaining unit that clamps one end of a target substrate having a curved portion and adjusts a height of the curved portion to maintain the cleaning area of the target substrate in a predetermined orientation with respect to the pressure-type cleaning unit, and a moving unit that moves the cleaning area flat maintenance unit back and forth in one direction with respect to the pressure-type cleaning unit.
A curved target substrate cleaning system, comprising:
Dependencies are inferred from the claim text.