Microfluidic apparatus, driving method and formation method thereof

A microfluidic apparatus, comprising:

• a first substrate and a second substrate which are oppositely disposed, wherein:
• the first substrate and the second substrate are both smooth substrates;
• an electrode array layer is on a side of the first substrate facing the second substrate, and a second electrode layer is on a side of the second substrate facing the first substrate;
• the electrode array layer includes at least a plurality of first electrodes and a plurality of second electrodes;
• in a direction in parallel with a plane of the first substrate, the first substrate includes a first region and a second region along a first direction;
• the plurality of first electrodes is in the first region, and the plurality of second electrodes is in the second region;
• in a direction perpendicular to the plane of the first substrate, a distance between the first substrate and the second substrate in the first region is D1, and a distance between the first substrate and the second substrate in the second region is D2, wherein D1>D2;
• the second electrode layer is an entire-surface structure and connected to a ground signal;
• along the first direction, a distance between the first substrate and the second substrate in the direction perpendicular to the plane of the first substrate gradually decreases from the first region to the second region;
• an orthographic projection shape of a first electrode on the first substrate is a trapezoid, and an orthographic projection shape of a second electrode on the first substrate is a trapezoid;
• and
• the first electrode includes a first short side and a first long side in parallel along a second direction, and along the first direction, the first long side is on a side of the first short side adjacent to the second region, and the second electrode includes a second short side and a second long side in parallel along the second direction, and along the first direction, the second long side is on a side of the second short side away from the first region, so that the first long side of the first electrode is closer to the second region than the first short side of the first electrode, and the second short side of the second electrode is closer to the first region than the second long side of the second electrode.