Bonding wire for semiconductor devices
AssigneeNippon Micrometal Corporation
InventorsDaizo Oda, Motoki Eto, Takashi Yamada, Teruo Haibara, Ryo Oishi
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AssigneeNippon Micrometal Corporation
InventorsDaizo Oda, Motoki Eto, Takashi Yamada, Teruo Haibara, Ryo Oishi
Estimating the term…
The bonding wire for semiconductor devices includes a core material of Cu or Cu alloy and a coating layer containing conductive metal other than Cu formed on a surface of the core material. The coating layer has a region containing Pd as a main component on a core material side, and has a region containing Ni and Pd in a range from a wire surface to a depth of 0.5 d, the thickness d (nm) of the coating layer is 10≤d≤130, a ratio of a concentration CNi (mass %) of Ni to a concentration CPd (mass %) of Pd relative to the entire wire is 0.02≤CNi/CPd≤0.7, and a position indicating a maximum concentration of Ni which is 10 atomic % or more, is present in the range from the wire surface to a depth of 0.5 d in a concentration profile in a depth direction of the wire.
A bonding wire for semiconductor devices, the bonding wire comprising:
Dependencies are inferred from the claim text.