Position determination apparatus for robot detection laser sensor system in FOUP movable by OHT

A position determination apparatus for a robot detection laser sensor system in front-opening unified pods (FOUPs), comprising:

• an external server;
• and
• a wafer processing device for performing processing for wafers and transmitting integration management data to the external server,
• wherein the wafer processing device comprises:
• the FOUPs configured to accommodate the wafers therein;
• loadports to which the FOUPs are detachably coupled;
• processing chambers in which the processing for the wafers are performed;
• an equipment front end module (EFEM) disposed between the processing chambers and the loadports and having an end-effector adapted to get the wafers out of the FOUPs into the processing chambers or put the wafers finished in processing in the processing chambers into the FOUPs;
• and
• a controller configured to transmit, if the FOUPs are seated onto the loadports, the transfer path data of the end-effector to the external server when the end-effector moves forward or backward toward and from the FOUPs,
• wherein each FOUP comprises:
• a housing having an entrance toward and from which the end-effector is configured to move forward and backward;
• wafer mounting rails disposed spaced apart from one another by a given distance on both side inner walls of the housing in a height direction thereof to mount the wafers sequentially thereonto;
• T-axis sensors disposed on top and bottom of the entrance to sense a horizontal transfer path of the end-effector;
• a Z-axis sensor disposed on an inner bottom surface of the entrance to sense a vertical transfer height of the end-effector;
• a loadport mounting plate disposed on an underside of the housing and electrically coupled to the corresponding loadport;
• a sensor support plate mounted on lowermost wafer mounting rails and having a plurality of height sensors disposed on top thereof to sense a height of the corresponding FOUP from the corresponding loadport;
• a horizontal sensor disposed on a surface of the sensor support plate to sense whether the housing is located horizontally on level;
• and
• a radio communication part disposed inside the housing to transmit sensed values of the T-axis sensors and the Z-axis sensor, angle values sensed by the horizontal sensor, and height values sensed by the plurality of height sensors to the controller.