Semiconductor substrate, manufacturing method and manufacturing apparatus for semiconductor substrate, semiconductor device, manufacturing method and manufacturing apparatus for semiconductor device, and electronic device

A manufacturing method for manufacturing a semiconductor device from a semiconductor substrate, the semiconductor substrate comprising:

• a template substrate comprising a first region, a second region, and a third region that are aligned in a second direction in a plan view;
• and
• a first semiconductor part comprising:
• (i) a first base portion which is elongated upward from the second region and (ii) a first floating portion which is elongated from the first base portion to above the first region and is not in contact with the first region, and wherein:
• a longitudinal direction of the second region is a first direction, the manufacturing method comprising:
• forming a first body portion and a first tether portion which connects the first body portion and the first base portion by patterning the first floating portion, and wherein:
• the first tether portion has a length in the first direction shorter than a length of the first body portion in the first direction.