Josephson junction device and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsJaehyeong Lee, Jinhyoun Kang, Jaeho Shin, Daeseok Han
Life of this patent
Estimating the term…
Loading patent…
AssigneeSamsung Electronics Co., Ltd.
InventorsJaehyeong Lee, Jinhyoun Kang, Jaeho Shin, Daeseok Han
Estimating the term…
A Josephson junction device and a method of manufacturing the Josephson junction device are disclosed. The Josephson junction device includes a substrate having a top surface and a trench recessed below the first surface, wherein sidewalls of the substrate define sidewalls of the trench; a first superconducting electrode formed on the top surface of the substrate with sidewalls further defining the sidewalls of the trench; a tunneling thin film formed over the sidewalls of the substrate and over the sidewalls of the first superconducting electrode; and a second superconducting electrode formed in the trench in contact with the tunneling thin film and with top surface above the top surface of the substrate, wherein a superconducting tunnel junction is formed between the first superconducting electrode and the second superconducting electrode through the tunneling thin film.
A Josephson junction device comprising:
A Josephson junction comprising:
Dependencies are inferred from the claim text.