Piezoelectric laminate, piezoelectric element, and manufacturing method for piezoelectric laminate

A piezoelectric laminate comprising in the following order:

• a substrate;
• a lower electrode layer;
• and
• a piezoelectric film containing a perovskite-type oxide as a main component,
• wherein the piezoelectric film is a single unitary piezoelectric film material layer, and has an oxygen-deficient region in a region in contact with the lower electrode layer,
• when three regions in a thickness direction of the piezoelectric film, each having ⅓ thickness of the piezoelectric film, are defined as a first region, a second region and a third region in the order from a side of the lower electrode layer, an average value of oxygen amounts in the second region is defined as a first average oxygen amount, and an average value of oxygen amounts in the oxygen-deficient region is defined as a second average oxygen amount,
• a ratio R of the second average oxygen amount to the first average oxygen amount is less than 0.97, and
• a thickness of the oxygen-deficient region is 120 nm or more and is ⅓ or less of a thickness of the entire piezoelectric film.