Backside conducting lines in integrated circuits
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWei-An Lai, Shih-Wei Peng, Te-Hsin Chiu, Jiann-Tyng Tzeng, Chung-Hsing Wang
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWei-An Lai, Shih-Wei Peng, Te-Hsin Chiu, Jiann-Tyng Tzeng, Chung-Hsing Wang
Estimating the term…
A method includes fabricating active-region structures extending in a first direction on a substrate, and fabricating a plurality of gate-conductors extending in a second direction above the substrate. The method also includes fabricating a backside horizontal conducting line in a backside first conducting layer below the substrate and having the backside horizontal conducting line extending in the first direction across a vertical boundary of a circuit cell. The method further includes fabricating a pin-connector that is connected to the backside horizontal conducting line, and fabricating a backside vertical conducting line extending in the second direction in a backside second conducting layer below the backside first conducting layer. The pin-connector is directly connected between the backside horizontal conducting line and the backside vertical conducting line.
A method comprising:
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