Semiconductor device
AssigneeKioxia Corporation
InventorsYuya Kiyomura, Ayako Kawanishi, Yuta Taguchi, Ayumi Watarai, Ippei Kume
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AssigneeKioxia Corporation
InventorsYuya Kiyomura, Ayako Kawanishi, Yuta Taguchi, Ayumi Watarai, Ippei Kume
Estimating the term…
A memory device includes a first chip including a first electrode and a second chip including a second electrode. The first electrode includes a first conductive film having a first surface in contact with the second electrode at a boundary region of the first and second electrodes, a second surface spaced apart from the boundary region, and a third surface between the first surface and the second surface, and having a first portion on the first surface side and a second portion on the second surface side, and includes a second conductive film covering the second surface and the third surface of the first conductive film. A (111) orientation ratio of copper contained in the first portion is higher than a (111) orientation ratio of copper contained in the second portion.
A semiconductor device comprising:
Dependencies are inferred from the claim text.