Collapse-free circuit structure with low capacitance effect

Abstract

A collapse-free circuit structure with low capacitance effect includes a circuit layer that is layered between a connection layer and a bottom circuit layer. A pad and an upper circuit of the connection layer are spaced with an upper gap for electrical insulation. The bottom circuit layer includes a bottom circuit and a pad supporting structure, wherein the pad supporting structure is located right below the pad. The pad supporting structure and the bottom circuit are spaced with a bottom gap for electrical insulation. The circuit layer includes a circuit layer dielectric, wherein the circuit layer dielectric is located between the pad and the pad supporting structure. The existence of the upper gap and the bottom gap ensures low capacitance effect between the connection layer and the bottom circuit layer. The pad supporting structure prevents the pad from collapsing.

Dependencies are inferred from the claim text.