Back to results
US 12,739,572 B2Granted
Mems microphone and electronic device
AssigneeGoertek Microelectronics Inc.
InventorQuanbo Zou
Life of this patent
Estimating the term…
Abstract
Disclosed are a MEMS microphone and an electronic device. The MEMS microphone comprises a substrate, a diaphragm, and a backplate. The backplate is formed with a support, and comprises a first back-electrode region and a second back-electrode region which are connected to different electrodes.
Claims16
A MEMS (Micro-Electro-Mechanical System) microphone, comprising:
- a substrate, on which an acoustic cavity is formed;
- a diaphragm having a fixed part which is fixed on the substrate, and a suspended part which is located above the acoustic cavity;
- and
- a backplate provided on the substrate, with a gap formed between the backplate and the diaphragm, and the backplate being provided with a support distributed annularly thereon, and the support extending toward the diaphragm, corresponding to a position of the suspended part and dividing the suspended part into an inner suspended region and an outer suspended region;
- wherein when the backplate and/or the diaphragm is energized, the suspended part is configured to abut against the support such that the inner suspended region is excited by sound pressure to vibrate mechanically, and the inner suspended region surrounds the support to drive the outer suspended region to vibrate, wherein a vibration direction of the inner suspended region is opposite to that of the outer suspended region;
- the diaphragm and the backplate form a capacitive structure which is divided into an inner capacitor and an outer capacitor by the support.
3 more elements
A MEMS (Micro-Electro-Mechanical System) microphone, comprising:
- a substrate, on which an acoustic cavity is formed;
- a backplate provided on the substrate and provided with a protruding support distributed annularly thereon;
- a diaphragm having a fixed part which is fixed on the substrate, and a suspended part, a gap between the backplate and the diaphragm, and the support dividing the suspended part into an inner suspended region located above a sound input channel and an outer suspended region located outside the sound input channel;
- when the backplate and/or the diaphragm is energized, the suspended part is configured to abut against the support such that the inner suspended region is excited by sound pressure to vibrate mechanically.
1 more element
Dependencies are inferred from the claim text.