Vibrator device and method for manufacturing vibrator device

A vibrator device comprising:

• an element substrate including a frame portion having a first surface and a second surface at an opposite side from the first surface, and a vibrator element disposed inside the frame portion;
• a first substrate having a third surface on a first surface side and a fourth surface at an opposite side from the third surface, the first substrate being bonded to the first surface of the frame portion at the third surface;
• a second substrate having a fifth surface on a second surface side and a sixth surface at an opposite side from the fifth surface, the second substrate being bonded to the second surface of the frame portion at the fifth surface;
• and
• a cavity surrounded by the frame portion, the first substrate, and the second substrate, wherein
• the second substrate includes a through electrode at a position overlapping the frame portion in a plan view,
• an outer shape of the through electrode in the sixth surface in the plan view includes a first portion and a second portion,
• the first portion is located at a position closer to the cavity than is the second portion, and
• a curvature of the first portion is smaller than a curvature of the second portion.