Acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsTetsuya Kimura, Katsumi Suzuki, Toshimaro Yoneda, Kazunori Inoue, Naohiro Nodake, Masakazu Mimura
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AssigneeMurata Manufacturing Co., Ltd.
InventorsTetsuya Kimura, Katsumi Suzuki, Toshimaro Yoneda, Kazunori Inoue, Naohiro Nodake, Masakazu Mimura
Estimating the term…
An acoustic wave device includes a support substrate having a thickness in a first direction, a piezoelectric layer on the support substrate, an interdigital transducer electrode on the piezoelectric layer and including first and second electrode fingers, the first electrode fingers extending in a second direction crossing the first direction, the second electrode fingers extending in the second direction and facing the first electrode fingers in a third direction orthogonal or substantially orthogonal to the second direction, and a reinforcing film on the piezoelectric layer. The support substrate and the piezoelectric layer include a hollow therebetween at a position overlapping the interdigital transducer electrode in the first direction. At least one through hole penetrates the piezoelectric layer at a position not overlapping the interdigital transducer electrode in the first direction, and the through hole communicates with the hollow. The reinforcing film overlaps the hollow in the first direction.
An acoustic wave device comprising:
Dependencies are inferred from the claim text.