Piezoelectric acoustic resonator with dielectric protective layer manufactured with piezoelectric thin film transfer process

An RF filter system, comprising:

• a plurality of bulk acoustic wave resonators arranged in a circuit, the circuit having a circuit response corresponding to the arrangement of the plurality of bulk acoustic wave resonators, one of the resonators of the plurality of resonators comprising:
• a reflector;
• a support member including a surface;
• a first electrode overlying the reflector, portions of the surface of the support member of the resonator defining a cavity region and a portion of the first electrode of the resonator being located within the cavity region defined by the surface of the support member;
• a piezoelectric film overlapping the first electrode and overlying the reflector;
• a second electrode overlapping the piezoelectric film, overlapping the first electrode, and overlying the reflector;
• a passivation layer overlying the second electrode;
• and
• a dielectric protection layer (DPL) located between at least one of the first electrode and the piezoelectric film, and the second electrode and the piezoelectric film.