Laser device, laser device array, and method of producing a laser device

A laser device array in which a plurality of laser devices that can be individually driven are arranged, the laser device including

• a first light-reflecting layer that reflects light of a specific wavelength,
• a second light-reflecting layer that reflects light of the wavelength, and
• a stacked body that includes a first semiconductor layer, a second semiconductor layer, and an active layer, is disposed between the first light-reflecting layer and the second light-reflecting layer, and has a first surface on a side of the first light-reflecting layer and a second surface on a side of the second light-reflecting layer, the first semiconductor layer being formed of a semiconductor material having a first conductivity type, the second semiconductor layer being formed of a semiconductor material having a second conductivity type, the active layer being disposed between the first semiconductor layer and the second semiconductor layer and emitting light by carrier recombination, a lens being provided on the first surface,
• the lens having a lens shape protruding toward a side of the first light-reflecting layer with a first direction as a longitudinal direction and a second direction as a lateral direction, the first direction being parallel to a plane perpendicular to an optical axis direction of emitted light, the second direction being parallel to the plane and orthogonal to the first direction, a central portion of the lens in the first direction having a first width that is the shortest width along the second direction, a non-central portion of the lens in the first direction having a second width that is the largest width along the second direction, the lens having a shape in which a height thereof from the plane is uniform or the central portion is higher than an end portion, a radius of curvature of an apex of the lens in the second direction being uniform,
• the first light-reflecting layer being stacked on the first surface to form a concave mirror having a concave surface shape on the lens.

A method of producing a laser device, comprising:

• preparing a stacked body that includes a first semiconductor layer, a second semiconductor layer, and an active layer, and has a first surface and a second surface, the first semiconductor layer being formed of a semiconductor material having a first conductivity type, the second semiconductor layer being formed of a semiconductor material having a second conductivity type, the active layer being disposed between the first semiconductor layer and the second semiconductor layer and emitting light by carrier recombination;
• forming, on the first surface, a structure that is formed of a fluid material and has a certain thickness with a first direction as a longitudinal direction and a second direction as a lateral direction, the first direction being parallel to a plane perpendicular to an optical axis direction of emitted light, the second direction being parallel to the plane and orthogonal to the first direction, a central portion of the structure in the first direction having a first width that is the shortest width along the second direction, a non-central portion of the structure in the first direction having a second width that is the largest width along the second direction;
• deforming the structure by heating the structure to flow the fluid material and using a shape of the structure to form, on the first surface, a lens having a shape in which a height thereof from the plane is uniform or a central portion thereof is higher than an end portion, a radius of curvature of an apex of the lens in the second direction being uniform;
• stacking, on the first surface, a first light-reflecting layer that reflects light of a specific wavelength to form a concave mirror having a concave surface shape on the lens;
• and
• forming a second light-reflecting layer that reflects light of the wavelength on a side of the second surface of the stacked body.