Seal structure, substrate processing apparatus, substrate processing method and method of manufacturing semiconductor device
AssigneeKokusai Electric Corporation
InventorsTakayuki Sato, Tetsuaki Inada, Kenta Sasaki
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Abstract
According to one aspect of the technique of the present disclosure, there is provided a seal structure capable of sealing a space between a first structure heated by a heater and a second structure arranged so as to face the first structure, the seal structure including: a metal plate arranged in contact with the first structure; and a sealing material made of a resin material and arranged in contact with the metal plate and the second structure, wherein the space between the first structure and the second structure is sealed by the metal plate and the sealing material.
Claims19
A seal structure capable of sealing a space between a first structure heated by a heater and a second structure arranged so as to face the first structure, the seal structure comprising:
- a metal plate arranged in contact with the first structure;
- and
- a sealing material made of a resin material and arranged in contact with the metal plate and the second structure,
- wherein the space between the first structure and the second structure is sealed by the metal plate and the sealing material,
- wherein the metal plate and the sealing material are configured to separate a first buffer space and a second buffer space, and
- wherein the first buffer space to which a first gas is supplied is provided between the first structure and the second structure and the second buffer space to which a second gas is supplied is provided above the first structure.
A substrate processing apparatus comprising:
- a process chamber in which a substrate is processed;
- a heater configured to be capable of heating an inside of the process chamber;
- a first structure heated by the heater;
- a second structure arranged so as to face the first structure;
- and
- a seal structure capable of sealing a space between the first structure and the second structure, wherein the seal structure comprises:
- a metal plate arranged in contact with the first structure;
- and
- a sealing material made of a resin material and arranged in contact with the metal plate and the second structure,
- wherein the space between the first structure and the second structure is sealed by the metal plate and the sealing material,
- wherein the metal plate and the sealing material are configured to separate a first buffer space and a second buffer space, and
- wherein the first buffer space to which a first gas is supplied is provided between the first structure and the second structure and the second buffer space to which a second gas is supplied is provided above the first structure.
A substrate processing method, comprising:
- (a) loading a substrate into a process chamber of a substrate processing apparatus;
- (b) heating the substrate by a heater of the substrate processing apparatus;
- and
- (c) supplying a first gas and a second gas into the process chamber,
- wherein the substrate processing apparatus comprises:
- a first structure heated by the heater;
- a second structure arranged so as to face the first structure;
- and
- a seal structure capable of sealing a space between the first structure and the second structure, and
- wherein the seal structure comprises:
- a metal plate arranged in contact with the first structure;
- and
- a sealing material made of a resin material and arranged in contact with the metal plate and the second structure,
- wherein the space between the first structure and the second structure is sealed by the metal plate and the sealing material,
- wherein the metal plate and the sealing material are configured to separate a first buffer space and a second buffer space, and
- wherein the first buffer space to which the first gas is supplied is provided between the first structure and the second structure and the second buffer space to which the second gas is supplied is provided above the first structure.
Dependencies are inferred from the claim text.