Method for operating a particle beam microscope

A method of operating a particle beam microscope which comprises a particle beam source configured to generate a particle beam, an objective lens configured to focus the particle beam on an object, a scan deflector configured to deflect the particle beam so that an incidence location of the particle beam on the object is displaceable, and a detector configured to detect particles generated at the object by the particle beam incident on the object, the method comprising:

• generating an image of an object region of the object using the particle beam microscope by a method comprising:
• directing the particle beam to a multiplicity of incidence locations within the object region of the object by actuating the scan deflector;
• detecting particles using the detector;
• and
• generating a data record representing the image by way of a field of pixels, a position of a pixel in the field representing the incidence location and a pixel value of the pixel representing an intensity of the detected particles at the incidence location;
• generating a first image of a first object region of the object using the particle beam microscope, the first image having a first number of pixels;
• generating a second image of a second object region using the particle beam microscope, the second image having the first number of pixels;
• inputting the first data record representing the first image into an image processing program;
• inputting the second data record representing the second image into the image processing program;
• and
• generating a third data record on the basis of the first and the second data records by using the image processing program, with the third data record representing a third image of the object region by way of a field of pixels, with a position of a pixel in the field representing a location in the object region and a pixel value of the pixel representing an intensity at the location, with,
• wherein:
• the third image has a second number of pixels;
• N1 is the first number of pixels;
• N2 is the second number of pixels;
• 1.1*N1<N2;
• more than 50% of the area of the first object region overlaps with the second object region;
• and
• more than 50% of the area of the second object region overlaps with the first object region.