Capacitor and method for manufacturing the same
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsJihoon Park, Jungsub Choi, Kwangmook Lee, Jun-Goo Won, A Young Choi, Gwangpyo Park, Hyungoo Jeon
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Abstract
A capacitor may include a substrate, a first capacitor portion disposed on the substrate, and a second capacitor portion disposed on the first capacitor portion. The first capacitor portion may include a first insulation layer having a plurality of trenches, a first electrode disposed on the first insulation layer and in the plurality of trenches, a dielectric layer disposed on the first electrode, and a second electrode disposed on the dielectric layer.
Claims20
A capacitor, comprising:
- a substrate;
- a first capacitor portion disposed on the substrate;
- and
- a second capacitor portion disposed on the first capacitor portion,
- wherein the first capacitor portion comprises:
- a first insulation layer having a plurality of trenches;
- a first electrode disposed on the first insulation layer and in the plurality of trenches;
- a dielectric layer disposed on the first electrode;
- and
- a second electrode disposed on the dielectric layer.
A method for manufacturing a capacitor, the method comprising:
- forming a first insulation layer on a substrate;
- forming a trench in the first insulation layer;
- forming a first capacitor portion by forming a first electrode, a dielectric layer, and a second electrode in the trench;
- and
- forming a second capacitor portion having a first plate-shaped electrode and a second plate-shaped electrode inside a second insulation layer on the first capacitor portion.
Dependencies are inferred from the claim text.