Memory device with memory pillar inside conductor
AssigneeKioxia Corporation
InventorsHiroshi Maejima, Toshifumi Hashimoto
Life of this patent
Estimating the term…
Abstract
A first conductor extends along first and second axes. A first memory pillar is provided in the first conductor and includes a first semiconductor and a charge accumulation layer. A second conductor extends along the second axis and is in contact with the first memory pillar. A third conductor extends along the first and second axes and is arranged with a distance from the first conductor along the second axis. A second memory pillar is provided in the third conductor and includes a second semiconductor and a charge accumulation layer. The fourth conductor extends along the second axis and is in contact with the second memory pillar. The fifth conductor extends along the second axis and is coupled to the first and second memory pillars.
Claims18
A memory device comprising:
- a first conductor extending along a first axis and a second axis;
- a first memory pillar provided in an inside of the first conductor and including a first semiconductor and a charge accumulation layer around the first semiconductor;
- a second conductor extending along the second axis and being in contact with the first memory pillar;
- a third conductor extending along the first axis and the second axis and being arranged with a distance from the first conductor along the second axis;
- a second memory pillar provided in an inside of the third conductor and including a second semiconductor and a charge accumulation layer around the second semiconductor;
- a fourth conductor extending along the second axis and being in contact with the second memory pillar;
- a fifth conductor extending along the second axis and coupled to the first memory pillar and the second memory pillar;
- a sixth conductor extending along the first axis and the second axis and being arranged with a distance with the first conductor along the first axis;
- and
- a third memory pillar provided in an inside of the sixth conductor and including a third semiconductor and a charge accumulation layer around the third semiconductor, wherein
- the first conductor includes a first stepwise structure, the first stepwise structure is connected to a first contact,
- the third conductor includes a second stepwise structure, the second stepwise structure is connected to a second contact, and
- the first contact and the second contact are sandwiched by the first conductor and the third conductor along the first axis.
Dependencies are inferred from the claim text.