Simulation method, simulation apparatus, film forming apparatus, article manufacturing method and non-transitory storage medium

A method of forming an actual film of a curable composition in a film forming apparatus that brings a plurality of droplets of the curable composition arranged on a first member into contact with a second member to form the actual film of the curable composition in a space between the first member and the second member, the method comprising:

• determining a second range that is a target range of a simulation, the second range including a second region of the space between the first member and the second member, and the simulation being a simulation that, when executed, predicts a behavior of the curable composition in the second region of the space between the first member and the second member;
• executing the simulation in the second range to predict the behavior of the curable composition in the second region of the space between the first member and the second member;
• displaying a result of the simulation;
• and
• causing the film forming apparatus to form the actual film of the curable composition in the space between the first member and the second member according to the result of the simulation,
• wherein in the determining, the second region of the space between the first member and the second member is determined as the second range for executing the simulation based on information about an actual measurement result of another actual film of the curable composition previously formed by the film forming apparatus.

An apparatus that forms an actual film of a curable composition by bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member to form the actual film of the curable composition in a space between the first member and the second member, the apparatus comprising:

• (i) one or more memories configured to store computer-executable instructions and one or more processors configured to execute the computer-executable instructions stored in the one or more memories, (ii) one or more circuits, or both (i) and (ii) that cause the apparatus to:
• determine a second range that is a target range of a second simulation, the second range including a second region of the space between the first member and the second member, and the second simulation being a simulation that, when executed, predicts a behavior of the curable composition in the second region with a second accuracy,
• execute the second simulation in the second range to predict the behavior of the curable composition in the second region of the space between the first member and the second member with the second accuracy,
• display a result of the second simulation, and
• cause the apparatus to form the actual film of the curable composition in the space between the first member and the second member according to the result of the second simulation,
• wherein the second range is determined based on at least information about a result of a first simulation executed in a first range that includes a first region of the space between the first member and the second member that is greater in size than the second region of the space between the first member and the second member, the first simulation being a simulation that, when executed, predicts a behavior of the curable composition in the first region with a first accuracy lower than the second accuracy.

An apparatus that forms an actual film of a curable composition by bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member to form the actual film of the curable composition in a space between the first member and the second member, the apparatus comprising:

• (i) one or more memories configured to store computer-executable instructions and one or more processors configured to execute the computer-executable instructions stored in the one or more memories, (ii) one or more circuits, or both (i) and (ii) that cause the apparatus to:
• determine a second range that is a target range of a simulation, the second range including a second region of the space between the first member and the second member, and the simulation being a simulation that, when executed, predicts a behavior of the curable composition in the second region of the space between the first member and the second member,
• execute the simulation in the second range to predict the behavior of the curable composition in the second region of the space between the first member and the second member,
• display a result of the simulation, and
• cause the apparatus to form the actual film of the curable composition in the space between the first member and the second member according to the result of the simulation,
• wherein the second region of the space between the first member and the second member is determined as the second range for executing the simulation based on information about an actual measurement result of another actual film of the curable composition previously formed by the apparatus.